Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of Visualized Experiments
سال: 2018
ISSN: 1940-087X
DOI: 10.3791/58272